Technical University
of Denmark - DTU Nano Machining using 0.0002\' size end
mills.
Microscope image of micro milling
tools with diameters of 25µm and 200µm, respectively.
Photos provided
by Frederik Bundgaard, Department of Micro and
Nanotechnology at the at the Technical University of
Denmark.
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 Nano
Machining is achieved at the Department of Micro
and Nanotechnology at the Technical University of Denmark
using a Minitech CNC Micro Milling Machine.
Frederik Bundgaard is shown with a
Minitech Mini-Mill/3Pro equipped with a 50K RPM precision
spindle. End mills range from .0004\' to 0.0002\' and show
no deviation in repeatability when machining.
The stepper motors controlling the
stage employ micro-stepping, and a XYZ resolution of around
1µm is achieved. The repeatability of the system, including
the spindle run-out, has been experimentally found to be
less than 5µm when working on areas a few centimeters
across, which is the dimension typically used for
Microfluidic Systems.
 These photos
are close-ups of a Microfluidic channel milled in Topas
grade 5013.Picture A. Channel
milled using a 200µm tool. The side channel is milled using
a 25µm tool. The half circle pattern on the channel bottom
stemming from the end mill is clearly seen.
Picture B. A 100µm wide and deep
channel and through-hole 500µm in diameter. The surface of
the channel bottom is slightly more rough than the
sidewalls. The sides of the hole appear more rough than the
channel.
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